Certification media: TEOS, MO sources, etc.
Optional certifications: TS, UN, TPED/ADR
Working pressure: 1–10 MPa
Helium leak detection rate: ≤1×10⁻⁹ Pa·m³/s
Polishing grade: EP, Ra 0.07–0.25 μm
Certification media: TEOS, MO sources, etc.
Optional certifications: TS, UN, TPED/ADR
Working pressure: 1–10 MPa
Helium leak detection rate: ≤1×10⁻⁹ Pa·m³/s
Polishing grade: EP, Ra 0.07–0.25 μm